LION BALL[lion-ball] — Axial Fan
Thursday, July 30th, 2009Turbo Axial Fan Assembly provides a clean air supply system handling module substrate vacuum processing system. There is one or more turbo-axial fans of turbo-axial fan assembly for airflow generated by the substrate handling environment. The turbo-axial fans have adjustable vanes to control the axial fan speed and efficient use of existing powers.
There is a set of turbo-axial fans or axial fans for the clean air supply system 200 to move air through a high efficiency particulate air filter to remove particles from the air before entering the small environment of 120 particles. In addition, the rapid flow of 120 to delete any enviro